Senior Systems Engineer

Posted:
3/26/2026, 5:00:00 PM

Location(s):
Massachusetts, United States ⋅ Wilmington, Massachusetts, United States

Experience Level(s):
Senior

Field(s):
IT & Security

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: 3D metrology spanning the chip from nanometer-scale transistors to micron-level die-interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient.

Job Summary & Responsibilities

Onto Innovation’s state-of-the-art measurement, inspection, and lithography solutions for semiconductor manufacturing enable its customers to be first-to-market with premium products. The Compliance Engineer will contribute to Onto’s obligation to make our products compatible and compliant with global regulatory requirements throughout their life cycle. This will be accomplished by providing support and guidance related to compliant engineering concepts, techniques and documentation. 

Compliance / Systems Engineer Job Responsibilities and Duties

  • Achieve product compliance by developing and completing technical verification documentation.
  • Prevent compliance issues by collaborating with engineering design teams and reviewing design data.
  • Develop product compliance by applying compliance engineering concepts, approaches, techniques, and criteria.
  • Identify and resolve product and engineering design issues.
  • Coordinate third party audit activities.  For example, request quotations, submit requisitions, schedule, supervise, troubleshoot and review reports.
  • Advise product management on compliance-related matters.
  • Isolate non-conformance issues and pursue resolution.
  • Review reports, manuals, procedures and technical documentation for required information.
  • Prepare relevant documentation with analysis, statistics, and other data.
  • Update compliance knowledge database.
  • Create procedures and best practice documentation.

Qualifications

  • Bachelor's degree or higher in electrical engineering, system engineering or similar.
  • 3-5 years relevant work experience in product design.
  • 2-3 years relevant work experience in compliance.
  • Expert knowledge in at least one of the following standards SEMI S2, NFPA79, IEC 60204-1, IEC 60204-33.
  • Experience in UL 508A, NFPA 79, IEC 60204-1 or IEC 60204-33 compliant power distribution design.
  • Experience in designing safety related parts of a control system.  For example. emergency machine off circuits, emergency stop circuits or interlock circuits.
  • Experience in creating compliance processes, procedures and templates.

Why Join Onto Innovation?

At Onto Innovation, we believe your work should matter—and so should your well-being. That’s why we offer competitive salaries and a comprehensive benefits package designed to support you and your family. From health, dental, and vision coverage to life and disability insurance, PTO, and a 401(k) with employer match, we’ve got you covered. You’ll also enjoy access to our Employee Stock Purchase Program (ESPP), wellness initiatives, and cutting-edge tools—all within a collaborative, inclusive culture where your contributions are valued and recognized.

Compensation & Growth

• Base Salary Range:

$115,200.00 - $172,800.00, offered in good faith and based on experience, location, and qualifications.

  • Additional Rewards: Annual bonus opportunities and potential long-term incentives tied to both company and individual success.

Empowering Every Voice to Shape the Future:

Onto Innovation is committed to creating a workplace where every qualified candidate has an equal opportunity to succeed. We evaluate applicants based on skills, experience, and potential - without regard to race, color, religion, gender, sexual orientation, national origin, age, disability, veteran status, or any other characteristic protected by law. We believe diversity of thought and background drives innovation and strengthens our team.

Important Note on Export Compliance

For certain positions requiring access to technical data, U.S. export licensing review may be necessary for applicants who are not U.S. Citizens, Permanent Residents, or other protected persons under 8 U.S.C. 1324b(a)(3).